Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

نویسندگان

  • Maria Losurdo
  • Michael Bergmair
  • Giovanni Bruno
  • Denis Cattelan
  • Christoph Cobet
  • Antonello de Martino
  • Karsten Fleischer
  • Zorana Dohcevic-Mitrovic
  • Norbert Esser
  • Melanie Galliet
  • Rados Gajic
  • Dušan Hemzal
  • Kurt Hingerl
  • Josef Humlicek
  • Razvigor Ossikovski
  • Zoran V. Popovic
  • Ottilia Saxl
چکیده

This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron periodic structures. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about process control, geometry factors, anisotropy, defects, and quantum confinement effects of nanostructures.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Engineering of Membrane Gas Separation Processes: State of The Art and Prospects

Membrane processes are today one of the key technologies for industrial gas separations and show growing interest for future use in sustainable production systems. Besides materials development, dedicated engineering methods are of major importance for the rigorous and most efficient design of membrane units and systems. Starting from approaches based on simplified hypotheses developed in the 5...

متن کامل

Membrane Science and Research in Asia and the Middle East: State of the Art and Perspectives

Asia and Middle East represent one of the most dynamic regions in the world which has experienced fast economic and technological growth. Access to clean and affordable water is essential for building resilience and maintaining human’s well-being and livelihood development in this region. Likewise, various energy resources are fundamental to support stable economic and social progress for bette...

متن کامل

Nanotechnology: A new approach in pharmaceutics

Nanotechnology has changed our lives dramatically and influenced every sector of the research, engineering and also business community. Nanotechnology is a rapidly growing science of producing and utilizing nano-sized particles, that measure in nanometer. In other words, nanotechnology is the art of characterizing, manipulating and organizing matter systemically, at the nanometer scale, which h...

متن کامل

Nanotechnology: A new approach in pharmaceutics

Nanotechnology has changed our lives dramatically and influenced every sector of the research, engineering and also business community. Nanotechnology is a rapidly growing science of producing and utilizing nano-sized particles, that measure in nanometer. In other words, nanotechnology is the art of characterizing, manipulating and organizing matter systemically, at the nanometer scale, which h...

متن کامل

Preparation, characterization and antimicrobial property of ag+- nano Chitosan/ZSM-5: novel Hybrid Biocomposites

Objective(s): Binary hybrids of chitosan-zeolite have many interesting applications in separation and bacteriostatic activity. Materials and Methods: Template free ZSM-5 zeolite was synthesized by hydrothermal method, physical hydrogels of nano chitosan in the colloidal domain were obtained in the absence of toxic organic solvent and then nano chitosan/ZSM-5 hybrid composites with nano chitosan...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:

دوره 11  شماره 

صفحات  -

تاریخ انتشار 2009